Single wafer cleaning machine, wafer cleaning machine field, wafer cleaning machine, wet cleaning machine

A. equipment overview

1.1 Applications: Single chip cleaning dryer is a high cleanliness cleaning and drying equipment, with high-speed drying, fast drying, high efficiency, different wafer sizes, can be quickly replaced by the drying head to achieve. It is the main equipment of wet cleaning process, small size and smooth operation. It is mainly used for the cleaning and drying process of 2-8 inch semiconductor wafers, mask plates, various substrates and other materials. It has the advantages of low cost, fast application and production.
1.2 Name: Single piece cleaning and drying machine
1.3 Model: QSG-150

B.Main structural features

Single piece cleaning dryer main servo motor, PLC controller, man-machine interface, high clean valve, PFA tube, nitrogen heater, anti-corrosion shell, and spin dry and other parts.
2.1 Material: Imported PP board, can meet the clean room working environment.
2.2 Special servo motor, can achieve 10-3000 RPM, low speed uniform cleaning, high speed centrifugal drying.
2.3 Industrial PLC controller and man-machine interface, stable and reliable control of each component, intuitive and visual operation mode.
2.4 High-power nitrogen heater, fast heating nitrogen, improve drying efficiency.
2.5 Drying head details can be customized according to customer needs for different sizes of drying head

C.Main technical parameters