A wafer floodlight is a high-brightness lighting device used for semiconductor wafer inspection, whose main function is to provide enough light to observe defects on the wafer surface. In the semiconductor manufacturing process, wafer floodlights are widely used, especially in surface inspection and visual inspection.
A. Equipment overview
1.1 Product name: eye inspection light
1.2 Brand: CSMHK
1.3 Model: QG-150/QG-250
1.4 Product Application: Lighting equipment for naked eye observation, can detect a variety of semiconductor wafers (silicon, gallium arsenide, sapphire, silicon carbide, etc.) and liquid crystal substrate, in the processing of foreign bodies, scratches, uneven polishing, fog, scratches, etc.
B.Technical characteristics
2.1 Lighting rays greater than 300/400,000 luxes can easily detect defects that can only be detected by precision detectors;
2.2 The halogen lamp is used as a light source, the color temperature is as high as 3400°K, and the illumination and color ensure the stable strong light irradiation;
2.3 The use of cold mirrors reduces the thermal impact by 35%-50% compared with conventional aluminum mirrors;
2.4 The beam diameter is adjusted by the lens, 30-50mm free adjustment;
2.5 The bottom light, adjust the height of the lighting probe, easy to operate, can control the height of the investigation (140-300mm).
C.Main technical parameters
Main parameters of strong light | packing list | |
input voltage | AC220V 50Hz | 1 main light |
output voltage | DC0V—DC15V/0V-24V | 1 base |
equipment power | 150W/250W | 2 support rods |
type of cooling | forced cooling | 1 metal linker |
light source | halide torch | 1 main power supply |
Color temperature, tone | 3400°K 、white | 1 input power cable |
illumination | ≧300,000 luxes | 1 output power cable |
range of exposure | 30—50mm | 1 foot switch |
irradiation distance | 140—300mm | 1 copy of manual |